  In this series of three papers we present results from a combined
experimental and theoretical effort to quantitatively describe capacitively
coupled radio-frequency discharges in oxygen. The particle-in-cell Monte-Carlo
model on which the theoretical description is based will be described in the
present paper. It treats space charge fields and transport processes on an
equal footing with the most important plasma-chemical reactions. For given
external voltage and pressure, the model determines the electric potential
within the discharge and the distribution functions for electrons, negatively
charged atomic oxygen, and positively charged molecular oxygen. Previously used
scattering and reaction cross section data are critically assessed and in some
cases modified. To validate our model, we compare the densities in the bulk of
the discharge with experimental data and find good agreement, indicating that
essential aspects of an oxygen discharge are captured.
